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IPA VAPOR DRYING APPARATUS WITH IPA DENSITY MONITORING SENSOR TO PROPERLY COPE WITH VARIATION OF IPA DENSITY

机译:具有IPA密度监测传感器的IPA蒸气干燥设备,可正确应对IPA密度的变化

摘要

Purpose: IPA (isopropanol) vapour seasoning device with an IPA density monitor sensors is provided to the change shape that an IPA density is suitably dealt with by the variation for detecting IPA density in real time. Construction: a chip (135) build a shell (130) whose upper part in filled with deionized water. The top of shell is covered by a cover (120), has a scheduled inner space. IPA (145) and nitrogen (155) are provided and are ejected into chip by cover. One IPA/ nitrogen supply (NS)s part (200) provides IPA and nitrogen, is connected to cover. The density of the cover IPA of one density sensor (185) monitoring supply in real time, is positioned at IPA/ nitrogen supply (NS)s part.
机译:目的:提供带有IPA密度监控传感器的IPA(异丙醇)蒸气调味装置,以通过实时检测IPA密度的变化来适当处理IPA密度的变化形状。构造:芯片(135)构造壳体(130),其上部充满去离子水。壳体的顶部被盖(120)覆盖,具有预定的内部空间。提供IPA(145)和氮气(155),并通过覆盖层将其排出到芯片中。一个IPA /氮气源(NS)的一部分(200)提供IPA和氮气,连接到盖板。实时监控电源的一个密度传感器(185)的盖子IPA的密度位于IPA /氮气供应(NS)的部分。

著录项

  • 公开/公告号KR20050001202A

    专利类型

  • 公开/公告日2005-01-06

    原文格式PDF

  • 申请/专利权人 SAMSUNG ELECTRONICS CO. LTD.;

    申请/专利号KR20030042776

  • 发明设计人 PARK HAE YONG;

    申请日2003-06-27

  • 分类号H01L21/304;

  • 国家 KR

  • 入库时间 2022-08-21 22:06:07

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