MANUFACTURING APPARATUS CAPABLE OF REDUCING MANUFACTURING COSTS BY IMPROVING EFFICIENCY OF USING ELECTROLUMINESCENCE MATERIAL

摘要

PURPOSE: A manufacturing apparatus is provided to reduce manufacturing costs by improving efficiency of using an electroluminescence material, and achieve improved uniformity of thickness of a film formed on the overall surface of a substrate. CONSTITUTION: A manufacturing apparatus includes a film forming device having a deposition chamber(100). The deposition chamber includes a substrate holder(102) where a substrate(101) is arranged perpendicularly to a bottom surface of the deposition chamber and the substrate moves in an X-axis direction; an evaporation source opposed to the substrate; and a moving unit for moving the evaporation source in a Z-axis direction which is vertical to the X-axis direction. A deposition is carried out by moving the evaporation source up and down in the Z-axis direction, and repeatedly moving the substrate in the X-axis direction at regular intervals.