APPARATUS FOR MANUFACTURING A LARGE-SIZED LCD USING PLASMA TO ENHANCE STABILITY OF RF POWER AND SUPPLY MAXIMUM POWER

摘要

PURPOSE: An apparatus for manufacturing a large-sized LCD(Liquid Crystal Display) using plasma is provided to enhance stability of RF(Radio Frequency) power and supply maximum power, thereby enhancing stability and uniformity of plasma and improving uniformity of deposition process or etching process. CONSTITUTION: Plasma electrodes(50,51) are spaced from a processing chamber wall(10) at the shortest distance of 12 millimeter, wherein the processing chamber wall is grounded. And, the plasma electrodes are spaced from a chamber lid(11) at the shortest distance of 12 millimeter, wherein the chamber lid is grounded. Herein, insulators for preventing discharge are disposed between the plasma electrodes and the grounded processing chamber or between the plasma electrodes and the grounded chamber lid.