DE-CHUCKING APPARATUS OF ELECTROSTATIC CHUCK IN SEMICONDUCTOR EQUIPMENT FOR RAPIDLY DISCHARGING RESIDUAL CHARGES AND PREVENTING DAMAGE OF WAFER BY INSTALLING SIMULTANEOUSLY DRIVING UNIT, CHARGING UNIT, AND DISCHARGING UNIT AT ELECTROSTATIC CHUCK

摘要

PURPOSE: A de-chucking apparatus of an electrostatic chuck in semiconductor equipment is provided to discharge rapidly residual charges and prevent damage of a wafer by installing simultaneously a driving unit, a charging unit, and a discharging unit at the electrostatic chuck. CONSTITUTION: A second switch(31) is driven reversely to a first switch(21) of a driving unit in order to discharge residual charges from an electrostatic chuck. A storage battery(32) is used for storing charges through the second switch. A third switch(41) is connected to the first switch and is used for controlling a circuit between the storage battery and a grounding part in order to discharge the charges from the storage battery.