MULTI-CHAMBER SYSTEM OF MANUFACTURING SEMICONDUCTOR DEVICE FOR INCREASING EFFICIENCY BY USING PROCESS CHAMBER HAVING SEPARABLE STRUCTURE TO EXCHANGE EASILY PROCESS CHAMBER

摘要

Purpose: the multi-chamber system for manufacturing semiconductor device is arranged to improve efficiency by using a process chamber, has a separable structure easily exchange process room. Construction: multiple separable process rooms (200) include for handling chip, the sealing space of the first sluice valve and the first blocked valve. One wafer transfer chamber (100) is connected to process chambers by forming the first sluice valve of sealing space. One second valve is installed in a coupling part between process chamber and wafer transfer chamber. One exhaust apparatus (500) is connected to each process chamber by the first blocked valve. Second blocked valve is installed in a coupling part between process chamber and exhaust apparatus.