APPARATUS AND METHOD FOR DEPOSITING LARGE AREA MAGNESIUM OXIDE THIN FILM AT IMPROVED FILM FORMATION SPEED

摘要

PURPOSE: An apparatus and a method are provided to achieve improved film formation speed, and operate a power supply system in a stable manner without an interference by arranging magnesium targets in parallel with each other. CONSTITUTION: A method comprises a step of applying voltage to each of magnesium targets(11); a step of applying a power having a negative polar square wave with no interference of waveform by applying current to the respective magnesium targets when rise of the voltage stops; and a step of forming a magnesium oxide thin film on a substrate(41) by permitting the magnesium targets to emit magnesium particles when the power is applied.