APPARATUS FOR DRIVING BEAM GATE PREVENTING DAMAGE OF DRIVING SHAFT BY INSERTING RING BEARING IN DRIVING SHAFT

摘要

Purpose: the device driving beam gate that goes for a drive is arranged to prevent the damage of a driving shaft due to friction, by being inserted into a collar bearing in a driving shaft. Construction: being parallel to the transfer shaft below a process chamber and connect with a beam gate, into or there is the inside of room. One cam is connect, all by rotation driving energy with the driving link for providing driving energy. The reciprocal transfer shaft of side transfer shaft that there are one driving shaft (160) two perforated holes (162,164) to hold cam. In addition, a collar bearing (165) for abrasion is prevented to be inserted into each perforated well.