DEVICE FOR SENSING A HORIZONTAL SENSITIVITY OF A VIBRATION SENSOR COMPOSED OF AN AIR BEARING STRUCTURE, A REFERENCE VIBRATION SENSOR AND A STRUCTURE FOR ALTERNATING EXCITATION AND ROTATION

摘要

PURPOSE: A horizontal sensitivity sensor of a vibration sensor is provided to obtain an air bearing structure for improving the movement accuracy according to an excitation. CONSTITUTION: A horizontal sensitivity sensor contains a base(100), partitions(110), a sensor installation portion(200), a block(400), a reference vibration sensor(410), an exciter(600) and an air bearing portion(300). The partitions are stood on the base symmetrically. The sensor installation portion is installed between each partition. The block is fixed on the sensor installation portion and a vibration sensor for test(20000) is stood and fixed on the block. The reference vibration sensor transmits a trigger signal to the vibration sensor for test by fixing in the side of the block and interlocking with the detection of a reference vibration strength set in a controller. The exciter is connected with the rear side of the sensor installation portion to vibrate the sensor installation portion and the block against the partitions. The air bearing portion is installed inside each partitions by forming a withdrawing portion. The withdrawing portion injects air to float the air bearing portion by inserting both sides of the sensor installation portion and guiding the air bearing portion through an exciting direction. The sensor installation portion contains an installation bar, a housing(210) and a guiding plate(230). The installation bar contains a skirt portion. A first pneumatic inlet and a second pneumatic inlet are penetrated through the housing centering the skirt portion for an entrance of the compressed air to selectively move the installation bar upward and downward. Both sides of the housing are inserted in the air bearing portion. The guiding plate guides the movement of the installation bar by inserting in the upper center of the housing. Thereby, the measurement errors are reduced.