FILM HAVING HIGH TEMPERATURE OXIDATION RESISTANCE AND HIGH HARDNESS FORMED ON SUBSTRATE BY PHYSICAL VAPOR DEPOSITION TO SUBSTANTIALLY IMPROVE WEAR RESISTANCE

摘要

PURPOSE: To provide a high hardness film excellent in oxidation resistance and wear resistance even at a temperature of 1,000 degrees centigrade or more by constructing a laying up structure comprising a surface coating layer, a base layer and an intermediate layer formed on a boundary surface thereof and consisted of compositions of both layers. CONSTITUTION: A film having high wear resistance and high hardness comprises a coating layer formed on the outer surface of an object to be treated(10) and consisted of metal nitrides; a base layer(21) formed between the coating layer and the object to be treated and consisted of nitrides of Ti or Cr; and an intermediate layer(20) that is formed on a boundary surface of the coating layer and the base layer and contains compositions of the coating layer and the base layer contacted with the intermediate layer, wherein the coating layer comprises one or more layers in which a coating a layer(22) and a coating b layer(23) are alternately formed, and the coating a layer is formed as the outermost layer, wherein the coating a layer of nitride contains Al, Cr and Si as principle components, and a coating b layer, which is formed of a nitride having Ti and Al as principal components, contains 25 to 75 atom% of Al, and the balance being Ti, of metallic components only.