INKJET PRINT HEAD DRIVEN BY PIEZOELECTRIC AND ELECTROSTATIC SCHEME AND METHOD FOR MANUFACTURING THE SAME CAPABLE OF ENSURING DRIVING FORCE BY EMPLOYING COMPLEX DRIVING SCHEME

摘要

PURPOSE: An inkjet print head driven by piezoelectric and electrostatic schemes and a method for manufacturing the same are provided to raise nozzle density by employing a complex driving scheme using both piezoelectric effect and constant power. CONSTITUTION: An inkjet print head includes a fluid passage forming plate(110), a membrane(120), a middle electrode(132), a piezoelectric layer(133), an upper electrode(134), and a lower electrode(131). The fluid passage forming plate has a pressure chamber for filling ink to be discharged. The membrane(120) is formed on the fluid passage forming plate(110) and covers the pressure chamber. The piezoelectric layer(133) is formed on the middle electrode(132) in such a manner that the piezoelectric layer(133) is positioned at the upper part of the pressure chamber. The upper electrode(134) is formed on the piezoelectric layer(133). The lower electrode(131) is formed on the bottom surface of the pressure chamber.