LEVEL CONTROL JIG OF WAFER TRANSFER ROBOT TO MINIMIZE TIME AND EFFORTS FOR CONTROLLING LEVEL OF WAFER TRANSFER ROBOT

摘要

PURPOSE: A level control jig of a wafer transfer robot is provided to minimize time and efforts for controlling the level of a wafer transfer robot by easily and precisely determining whether the clamp level of the wafer transfer robot is properly controlled with respect to a slit. CONSTITUTION: The level of a clamp(124) for connecting the arm of a wafer transfer robot with a blade is used to control the slit(110) of a buffer chamber in which the wafer transfer robot is installed. A body(11) is inserted into the slit. A level reference inserting member(12) having the same height and width as the clamp is formed in the body so that the clamp is inserted into the body having the slit after the level of the clamp is adjusted with respect to the slit.