METHOD FOR MANUFACTURING HEAT EMITTER HAVING ELECTRODES THEREIN, PARTICULARLY CONCERNED WITH REDUCING DEVIATION IN THICKNESS OF DIELECTRIC LAYER

摘要

PURPOSE: A method for manufacturing a heat emitter having electrodes is provided to improve manufacturing yield by uniform plasma generation by reducing variation in thickness of an organic layer. CONSTITUTION: A ceramic sinter(1) or a ceramics plastic is formed. An electrode(2) is formed on the ceramic sinter or the ceramics plastic. A refractory metal(4) is buried on the electrode to form a ceramics substrate to serve as a heat emitter having embedded electrodes. A convex portion is formed at the center of a portion where the electrode is formed.