DISTRIBUTED CONSTANT TYPE ANALOG PHASE SHIFTER USING ETCHED FERROELECTRIC THIN FILM, CAPABLE OF REDUCING CHANGES IN CHARACTERISTIC IMPEDANCE WHILE MAINTAINING CHANGES IN PHASE SPEED CAUSED DUE TO APPLIED VOLTAGE, AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A distributed constant type analog phase shifter and a method for manufacturing the same are provided to reduce changes in characteristic of an CPW(coplanar waveguide) while maintaining changes in phase speed caused by a change in an applied voltage. CONSTITUTION: A distributed constant type analog phase shifter(100) comprises a substrate(110); a CPW extended in a line shape on the substrate; and a plurality of ferroelectric capacitors periodically loaded to the CPW. The ferroelectric substance of the ferroelectric capacitor is arranged into a pattern type.