PRESSURE SENSOR APPARATUS CAPABLE OF IMPROVING WORKABILITY AT LOW COST WHILE IMPROVING PRECISION AND RELIABILITY OF MEASUREMENT SIGNAL

摘要

PURPOSE: A pressure sensor apparatus is provided to improve workability thereof at a low cost while improving precision and reliability of a measurement signal by installing a signal terminal in opposition to a pressure port. CONSTITUTION: A pressure sensor apparatus(100) includes a pressure sensor chip(41), a base member(42), a metal pipe member(43) and a resin case(44). The pressure sensor chip(41) has a diaphragm(45), which is formed at a first surface of a semiconductor substrate. At least four gauges are formed at a second surface of the semiconductor substrate. The pressure sensor chip(41) is formed with a Wheatstone bridge circuit, an amplifying circuit for amplifying an output signal of the Wheatstone bridge circuit, a sensitivity compensating circuit, an offset compensating circuit, and a temperature characteristic compensating circuit.