EFFUSION CELL AND METHOD FOR DEPOSITING SUBSTRATE WITH THE EFFUSION CELL

摘要

The present invention, a plurality of evaporation source, an upper portion of the evaporation source, is disposed on the flow path of the material to be evaporated from the evaporation source, the baffle section consisting of one or more baffles to prevent the material to be evaporated from the evaporation source bundle, the enclosing a plurality of evaporation sources and the baffle portion, the outer portion of the evaporation material comprises an outlet formed on one side in order to discharge toward the substrate vertically arranged on the ground, forming at least a portion of said outside, from the evaporation source of the heat source heat blocking unit for blocking the radiation, and located proximate to said outlet, the deposition rate measuring unit for measuring the amount of vaporization of the evaporation material to be the discharge; And it is disposed on the one side the outer frame portion, an evaporation source for depositing the evaporated material on a substrate, comprising a conveying means for conveying on a plane parallel to the outer parts of the substrate.