APPLICATION OF SCRUBBING PROCESS FOR - METHOD FOR TREATING OF ETCHING WASTE ACID OR WASTE ACID-

摘要

The present invention of a number of steps in the acid separation and recovery process through solvent extraction from reusing the recovered acid (酸) by using the extraction agent in the etching waste liquid discharged from the liquid crystal or semiconductor manufacturing process, etching waste liquids, extracts making the acid is extracted by using the organic phase as the I rough cleaning (洗淨) process prior to the stripping step for recovering the separated acid by stripping them, a technique related to the number of times than the purified acid (酸) possible.; In other words, the present invention relates to go through the washing (洗淨) operation prior to the stripping with water acid in the organic phase extracted to recover the purified acid new acid (酸) recovering the separation process.; Traditionally, the purity of the recovered acid was not high enough, by stripping with water without any cleaning step. Removal former (前) cleaning method according to the invention has the practical acid (酸) recovering detachable advantage because the acid is purified by the cleaning operation.; Process for recovering the purified acid by the cleaning process according to the invention, and it is easy to reuse the recovered acid because it can obtain a more refined acid through the cleaning operation before stripping, the cost savings for economic feasibility said Genie, may well have the advantage that impurities are more refining to remove acid recovery removable.