ZONE-PLATE AND SPECIMEN ALIGNING OPTICAL SYSTEM FOR SOFT X-RAY MICROSCOPE

摘要

The present invention by installing a collimator lens actuator is mounted to the outside of the vacuum chamber to adjust to, and more particularly, to the specimen and the focal distance between the zone plate on the zone plate and the specimen alignment optical system of the soft X- ray microscopy specimen or relates to the soft zone plate and the specimen alignment optical system of the X- ray microscope to detect the position of the zone plate. Zone plate and the specimen alignment of the soft X- ray microscope according to an embodiment of the present invention the optical system in the interior of a vacuum chamber provided with a transmission window, for condensing the soft X- ray incident on the soft X- ray source to the specimen condensing mechanism; Zone plate to converge the the soft X- ray emission from the specimen of a soft X- ray detector; The specimen and the objective lens to converge the center with a through fixing installed and visible light in the same direction from the zone plate to the specimen or the zone plate; And wherein from the objective lens is arranged in the same direction as the center through-reflection mirror for reflecting the visible light; and installed, on the outside of the vacuum chamber, is provided on a visible light proceeding path emitted from the visible light source a collimator lens for transmitting the visible light; The visible light is disposed after the collimating lens on the traveling path of the light separator that reflects the rest and transmitting a part of visible light from the opposite side; The imaging lens installed in order to bear an image on one side and an actuator for moving the mounting of the optical separator; And a visible light detector for detecting visible light incident from the imaging lens; characterized in that the installation.