SYSTEM AND METHOD FOR RECYCLING DEVELOPER SOLUTION CONTAINING TETRA-METHYL-AMMONIA-HYDROXIDE(TMAH)

摘要

It relates to a method and system of the TMAH concentration adjustment. m is equal to 2 or greater and is measured respectively 220 nm and absorption values ​​Y1 to Ym, and A1 of the reproduced SYMPTOMS m wavelength and 210 nm wavelength between 250 nm solution. X is a wavelength, n is a positive integer, C ₁ to C _n is n th order polynomial equation, Y = C ₁ⁿ + X in order to create a relationship between a wavelength of absorption coefficient ... Wherein Y1 and Ym is input to the _{+ C n-1 X + C} n. A wavelength absorption relationship in order to create the adsorption value Y ₂₁₀ is input to a wavelength of 210nm. The absorption value of TMAH in the developing solution, the difference between A1 and A3 of the Y ₂₁₀ is calculated, and the A3 are input to the TMAH absorption correction curve in the 210 nm to produce the TMAH concentration. Then TMAH is added to provide the concentration of TMAH.