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METHOD FOR POSITIONING AND TRANSFERRING AT LEAST TWO DIFFERENT PATTERNS FROM A SUPPLY STRIP
METHOD FOR POSITIONING AND TRANSFERRING AT LEAST TWO DIFFERENT PATTERNS FROM A SUPPLY STRIP
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机译:用于从供应带至少定位两个不同图案的方法
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摘要
A method wherein a supply strip (bm) is entrained at a constant speed, which speed is the same as that of the substrate in strip form (c), during transfer between strips of each pattern and according to a speed profile which is determined between two transfers of the patterns. There is determination of the speed profile by measuring the time which elapses between the passages of two homologous references (m 1 ) of two successive groups of areas specific to the patterns to be deposited. From this time there are deduced the times of displacements of the supply strip (bm) during the transfers of the two patterns, calculation of the length between the respective adjacent patterns (HSUBi/SUB, FSUBi/SUB, GSUBi/SUB) on the supply strip (bm), and that length is compared with the length of the displacement between the respective locations of the two same successive patterns on the substrate (c), in order to make the transfer of the said patterns coincide with their respective locations on the said substrate (c).
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机译:一种方法,其中在每个图案的条带之间转印期间,根据确定的速度曲线,以恒定的速度夹带供应条带(bm),该速度与条形(c)的基材的速度相同。模式的两次转移。通过测量特定于待沉积图案的两个连续区域组的两个同源参考(m 1)的通道之间经过的时间来确定速度分布。从这时开始,推导两个图案在转印过程中进纸带(bm)的位移时间,计算出各个相邻图案(H i SUB>,F i SUB>,G i SUB>),然后将该长度与基板上两个相同连续图案各自位置之间的位移长度进行比较(c)为了使所述图案的转印与它们在所述基板(c)上的相应位置一致。
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