COOLDOWN LIFT ASSEMBLY OF COOLDOWN CHAMBER

摘要

The invention rapidly cool the cool-down chamber at a heat treatment system down lift assembler brie the bar, which is to place the wafer and install a new lift pins assembler debris using a bearing structure connecting the up / down cylinder and the lift pin and the guide pin Cool down will lift debris on the assembler of the cool-down chamber capable.; The present invention to achieve this by the lift pins lift shaft by reciprocating movement of the up / down cylinder moves in the vertical direction in the cooldown chamber to let the lift plate rises a lift pin or the falling down, each of the vertical of the lift plate and that the pin through the respective connecting means is provided for each lift pin, each guide pin is provided through each connection means to the outside of these lift pins to its features.