COLD ATMOSPHERIC PRESSURE PLASMA GENERATOR FOR A WIDE SURFACE PLASMA TREATMENT

摘要

The plasma generating device capable of providing a low-temperature atmospheric pressure plasma is stably provided. The plasma generation device, since a power pole, a first dielectric layer, the secondary plasma earth electrode, the second dielectric film, comprising: a gas inlet and a power controller, a secondary plasma earth electrode is there and closely adjacent to each power pole and a small area, a power pole, and It characterized in that to generate a secondary plasma in the lower power than the main plasma is generated in the object to be treated in the liver. The plasma generation device may generate a low-temperature plasma under atmospheric pressure, it is possible to provide a stable plasma by using a secondary plasma. In particular, it is possible to produce a glow plasma that while uniformly applied to a large area, because the auxiliary plasma functions as a stable plasma source, even when using a transfer sample handling and during the supply of power to an external gas inlet unstable radio frequency generator .