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A graphite crucible and a quartz crucible of a grower for single crystalline silicon

机译:用于单晶硅的生长器的石墨坩埚和石英坩埚

摘要

The present invention relates to a graphite crucible and a quartz crucible provided in the silicon single crystal growing apparatus.; Graphite crucible and a quartz crucible of the present inventors the silicon single crystal growth apparatus for this purpose is said to form a straight wall portion, and is characterized by formed portion curved bottom formed to a radius of curvature, at this time, the curved bottom portion of the graphite crucible and the quartz crucible. focus (F) of the curvature radius (R) is preferably formed to higher than or equal to the lower end (a) of the straight side wall.; In particular, and a heat shield provided in the silicon single crystal growth apparatus, it is more preferably formed so as to focus (F) of the curvature radius (R) of forming curved bottom portion of the graphite crucible is lower than or equal to the lower end of the heat shield.
机译:本发明涉及设置在硅单晶生长装置中的石墨坩埚和石英坩埚。据说本发明人的石墨坩埚和石英坩埚用于该目的的单晶硅生长装置形成直壁部,其特征在于,形成为曲率半径的弯曲底的形成部分,此时,该弯曲底石墨坩埚和石英坩埚的一部分。曲率半径(R)的焦点(F)优选形成为大于或等于直侧壁的下端(a)。特别地,在设置于硅单晶生长装置中的隔热板中,更优选形成为使形成石墨坩埚的弯曲底部的曲率半径(R)的焦点(F)小于或等于F。隔热罩的下端。

著录项

  • 公开/公告号KR100488905B1

    专利类型

  • 公开/公告日2005-05-11

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20020085395

  • 发明设计人 송도원;김상희;

    申请日2002-12-27

  • 分类号C30B15/10;

  • 国家 KR

  • 入库时间 2022-08-21 22:03:50

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