NEEDLE OF PROBE CARD USING MICRO-FABRICATION, MANUFACTURING METHOD THEREOF AND PROBE CARD MANUFACTURED BY THE NEEDLE

摘要

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a needle of a probe card using a micro fabrication technique, a method of manufacturing the probe card, and a probe card embodied by the needle. The probe needle is a probe needle made of a conductive metal by photolithography using photoresist on a ceramic substrate. After forming the proximal end and the polymer elastomer, a conductive metal is continuously deposited on the probe needle proximal end to support the polymer elastic so as to have a probe tip. The probe card includes: a PCB connected to a test head for transmitting an electrical signal from the tester; a ceramic substrate positioned below the PCB and electrically connected by a plurality of interface pins; A jig for mechanically holding the PCB, the plurality of interface pins and the ceramic substrate; And a plurality of probe needles attached to the bottom surface of the ceramic substrate and in contact with the electronic component.