LINE-SCAN INSPECTION SYSTEM WITH TILTED MOVING TFT-LCD GLASS SUBSTRATE

摘要

PURPOSE: A tilting slide and line scan system is provided to reduce an inspection load by minimizing a pollution of a particle and to stably maintain an inspection area within a focus depth area of a camera. CONSTITUTION: A tilting slide and line scan system contains a conveyor body of a glass substrate, a horizontal carrying device, an air floating device, an inclined carrying device and a line scan inspector(70). The line scan inspector contains a rectangular square shaped frame(72), a permeable lighting system(74), a reflection lighting system(76), plural line scan cameras(80), a detecting device and lamp light sources(82). The frame is installed to pass the inclined glass substrate through the center. The permeable lighting system irradiates light to the glass substrate by installing in one side of a passage in the glass substrate. The reflection lighting device reflects irradiated light by installing in the other side of the passage. The line scan cameras generate digital image information by installing in the opposite side against the permeable lighting system in the vertical direction of the frame and photographing images of the irradiated glass substrate and the inner and the outer parts of the reflected glass substrate in a line unit. The detecting device transfers a signal to start an inspection through the line scan cameras by detecting the transfer of the glass substrate. The lamp light sources are installed in the outside of the frame as light sources of the permeable lighting system and the reflection lighting system. Thereby, the productivity and the inspection efficiency are improved.