SYSTEM FOR CONTROLLING TECHNOLOGICAL PROCESS FOR LASERS USED IN LITHOGRAPHY

摘要

FIELD: control systems, for lasers in particular.;SUBSTANCE: each laser on each factory is connected to appropriate server of terminal, while at each factory server of central control node exchanges information with each laser through local network. Gathering of information from lasers is realized via server device of central control and this information is used for forming of total information, which is accessible for interested parties, which are allowed to view content of Web-server.;EFFECT: higher efficiency.;14 cl, 5 dwg, 2 tbl