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A process for the doping of the external base terminal regions of si - based simple npn bipolar transistors - - - polysilicon

机译:硅基简单npn双极晶体管---多晶硅外部基极端区的掺杂工艺

摘要

A process for the doping of the external base terminal regions of si - based simple polysilicon - - - npn bipolar transistors, characterized in that a diffusion method with a bbr3-The lining. the process is used as shown in figs.
机译:一种基于si的简单多晶硅npn双极晶体管的外部基极端区的掺杂工艺,其特征在于,采用bbr 3 -衬里的扩散方法。该过程如图1和2所示。

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