A process for producing a micromechanical component with the conclusion of the vehicle interior and the micromechanical component with the conclusion of the interior space

摘要

A process for producing a micromechanical component (110) with the conclusion of the interior space (13), in which two substrates (11, 12) are joined together, in order to switch between the two substrates (11, 12) to form an interior space (13), whereby a connection point (17) of the two substrates (11, 12) the interior space (13) and separates from the exterior space, comprising the steps of:Designed as a recess (14) in a surface of a first substrate (11);Placing a conductor track (15) in the recess (14);Covering the conductor track (15) with an electrically insulating material (16; 16b);the conductive track (15) below the surface of the first substrate (11) by means of the connection point (17) is guided, in order to produce an electric contact between the interior space (13) and to form the external space,characterized by the,that the second substrate (12) on its the first substrate (11) facing side next to the connecting point (17) has a recess (23), in which before the joining of the two substrates (11, 12) a..