Device for confocal optical scanning of an object comprises a second mirror that can be tilted about an axis relative to a concave first mirror so that a region of an object plane can be scanned with an optical beam

摘要

Device for confocal optical scanning of an object comprises an optical arrangement (6) generating a first focal point (13) or a region with small beam cross-section of a coupled optical beam (1) in a first plane (30), a concave first mirror (10) with a central aperture (11) allowing passage of the optical beam from the rear side of the mirror, and a second mirror (12) arranged relative to the first mirror so that the optical beam passing through the aperture is reflected onto the first mirror. The second mirror can be tilted about at least one axis so that a region of an object plane (20) can be scanned with the optical beam. The optical arrangement and the concave mirror are coordinated with each other so that the optical beam after reflection at the concave mirror forms a second focal point (14) in the object plane confocally to the first focal point or the region with small beam cross-section. Preferred Features: The concave mirror is a paraboloidal-type reflector. The second mirror is a micromirror.