Sensor unit, for mass flow meter, has catalytic active coating covering temperature-dependent resistance layer, where coating accelerates oxidation of oil and has ninety five percent of aluminum oxide and five percent of zirconium oxide

摘要

Sensor unit (7) has a temperature-dependent resistance layer (17) on a substrate (16). A catalytic active coating (19) that accelerates oxidation of oil covers the resistance layer and is applied on the resistance layer or an intermediate layer. The intermediate layer is located on a side of the resistance layer that is facing away from the substrate. The coating has 95% of aluminum oxide and 5% of zirconium oxide. An independent claim is also included for a mass flow meter comprising a sensor unit.