Beam shaping/deflection for extreme ultraviolet radiation involves total reflection at reflection surface of molded body with surface area formed by solidifying material from viscous molten material and with extent of at least 5 by 5 mm

摘要

The method involves deflecting the radiation by total reflection at a reflection surface of a molded body (5) with a surface area (6) formed by solidifying a material from a viscous molten material and with an extent of at least 5 by 5 mm. The molded body is formed by a molding process directly on the viscous molten material.