Measuring device manufacturing method for determining and/or monitoring process factor, involves modifying vibration characteristics of mechanically vibrating unit if difference between its frequencies is greater than tolerance value

摘要

The method involves inciting a mechanically vibrating unit, and receiving vibrations of the unit. An adjustable incitement frequency of the unit is varied and the vibrations are evaluated in such a manner that resonance frequencies of the unit are determined. The vibration characteristics of the unit is modified if a difference in the frequencies is greater than a given tolerance value. Independent claims are also included for the following: (A) a device for the manufacture of a measuring device (B) a measuring device for determination and/or inspection of a process factor.