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measurement of mikrogalvanisch manufactured components by schnittbauteile on lackstege
measurement of mikrogalvanisch manufactured components by schnittbauteile on lackstege
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机译:力不足时用金属丝对米克罗瓦尔瓦尼奇制造的部件进行测量
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摘要
A method for measuring microgalvanically produced components having a three-dimensional, depth-lithographically produced structure, which provides a single- or multilayer component which is constructed using galvanic metal deposition, the metal being deposited around a structure of photoresist defining the desired orifice contour of the component; in the process, a photoresist region, which selectively interrupts the structure of the component to be manufactured, being incorporated during the microgalvanic production; at least the interrupting photoresist region being dissolved out of the interrupted component; and a contactless measuring of the orifice structure of the interrupted component being undertaken in the region of a previously existing resist edge of the photoresist region using a measuring device.
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