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A CAPACITIVE ORDER, MICROMECHANIC ULTRASCAL CHANGE REQUIREMENTS WITH CONTACT THROUGH THE TRACTOR TRANSMISSION TREATY
A CAPACITIVE ORDER, MICROMECHANIC ULTRASCAL CHANGE REQUIREMENTS WITH CONTACT THROUGH THE TRACTOR TRANSMISSION TREATY
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机译:电容式订单,微机械的超音速变化要求,通过拖拉机的传输条约与之取得联系
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摘要
There is described a cMUT array with transducer elements which include a plurality of cells with membranes formed on one surface of a wafer. Voltages applied between said spaced electrodes drive said membranes. The voltages applied to said electrodes are applied from the opposite surface of the wafer through the wafer and through vias formed in the wafer.
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