Method of manufacturing a device in a thin layer produced on a substrate, in particular, a sensor, as well as a device in a thin layer

摘要

Method of manufacturing a device in a thin layer formed on a substrate (1 a, 26, 48), in particular, a sensor (20), with a system of functional layers (2) which are relatively thin formed of several layers separated as a whole constituting an electrical portion essential functional of the device to a thin layer to the electrical structures (41 - 44), and a metallization (4) is applied to the system of functional layers to the contacts (21, 22) and the conductive paths (4a, 23). The system of functional layers (2) and the metallization (4) are made successively without in the interval to be brought into contact with the ambient atmosphere, then it carries out the structure of the layers.