Flexible layer unit fabricating method for manufacturing micropump, involves applying sacrificial layer on base plate and functional layer, and forming cavity in inner surface of base plate

摘要

The method involves forming a layer unit (12) as a sealing unit on a micropump. A sacrificial layer (17) is applied on a base plate (2) and a functional layer (3). A cavity (7) is formed in an inner surface of the base plate. The sacrificial layer above the cavity is completely removed. The functional layer is disengaged till an opening zone in a fixed structure. An independent claim is also included for a micro-pump having a flexible layer.