PROTECTION OF A DEFORMABLE MEMBRANE AGAINST HIGH DEFORMATIONS IN A MICROMECHANICAL STRUCTURE

摘要

Micromechanical structure for measuring or detecting a mechanical quantity or a dynamic quantity, comprising a deformable membrane and a support substrate, the membrane being suspended above the support substrate thus defining a free space, said micromechanical structure further comprising an abutment limiting the deformations of the membrane, characterized in that said abutment extends from the bottom of the free space to the membrane.The invention furthermore relates to a method for producing such a micromechanical structure. / P