Structure with optical guide e.g. micro-optical guide, producing method, involves depositing non-organic material layer on support surface, and changing chemical state of layer to form definition pattern of optical guide

摘要

The method involves depositing a non-organic material e.g. aluminum fluoride, layer (2) presenting a chemical state, on a support surface. The layer and the surface are chosen such that an optical index of core of an optical guide is higher than an optical index of the material of the surface. The layer is processed locally to change its state into another chemical state, to form a definition pattern of the optical guide.