Optical microscope for observing very small object, has illumination and imagery parts, each having Schwarzschild objective with optical axis, and detector for collecting enlarged image of object through imagery part

摘要

The microscope has an illumination part having a Schwarzschild objective (2) with an optical axis (D1) and a field mirror (6) inclined on the axis by an angle less than 15 degrees. A detector (D) collects an enlarged image of an object via an imagery part. The imagery part has a Schwarzschild objective (14) with an optic axis (D2) for receiving the light reflected by the object and an optical system (17) with concave spherical mirrors. The field mirror reflects the light along the optical axis (D2) such that the Schwarzschild objective (14) focuses the light beam on the object.