MANUFACTURING METHOD OF FILTER, AND INSPECTION METHOD USING FILTER

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a filter capable of manufacturing the filter in a short time, and an inspection method capable of improving inspection accuracy.;SOLUTION: This manufacturing method of the filter has a process S1 for dispersing shielding particles into a solvent; and a process S4 for jetting the shielding particles whose surfaces are coated with the solvent onto a transparent substrate, and thereby forming a shielding film formed by the shielding particles. This inspection method has a process S3 for extracting reference pattern information of an inspection object, a process S4 for forming a two-dimensional Fourier transform filter for canceling the reference pattern information based on the reference pattern information, and a process S5 for inspecting a defect pattern other than a reference pattern of the inspection object by using the two-dimensional Fourier transform filter.;COPYRIGHT: (C)2007,JPO&INPIT