MANUFACTURING METHOD OF SURFACE ACOUSTIC WAVE DEVICE, AND DISCHARGE DEVICE, AND SURFACE ACOUSTIC WAVE DEVICE, SURFACE ACOUSTIC WAVE OSCILLATOR, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a surface acoustic wave device, and a discharge device, and a surface acoustic wave device, a surface acoustic wave oscillator, and an electronic apparatus whereby it can be suppressed that a surface acoustic wave device with a possibility of occurrence of a fault because of a potential factor of becoming an off-spec product due to a sticking matter attached to a processing target region of the surface acoustic wave device is shipped as a nondefective product and gets a fault at a site wherein the surface acoustic wave device is in use.;SOLUTION: The manufacturing method of the surface acoustic wave device includes: a sticking matter inspection step (step S12) for inspecting the presence/absence of the sticking matter on an IDT 44; and a step S14 of short-circuiting electrodes 44a, 44b of the IDT 44 whose sticking matter is recognized. Further, the discharge device is provided with a sticking matter detecting device and a discharge head for discharging a conductive material. The surface acoustic wave oscillator is provided with the surface acoustic wave device manufactured by the manufacturing method or the discharge device, and the electronic apparatus is provided with the surface acoustic wave oscillator.;COPYRIGHT: (C)2006,JPO&NCIPI