FLOW PATH BLOCK FOR ACCUMULATED GAS CONTROL DEVICE AND ITS MANUFACTURING METHOD AND ACCUMULATED GAS CONTROL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a flow path block for an accumulated gas control device, allowing simple and reliable machining of a fluid flow path for maintaining a smooth flow of fluid such as process gas while shortening its machining time and having simplified and wholly compact construction for smoothing the supply of the fluid and eliminating a residing phenomenon of the fluid, and to provide its manufacturing method as well as the accumulated gas control device using the flow path block.;SOLUTION: The flow path block for the accumulated gas control device is provided on which an accumulation unit 100 such as an automatic valve is mounted for controlling the supply of fluid such as process gas. Through-paths 11, 12 are formed in a plate block body 10 in the direction of its thickness by passing through holes for the inlet/outlet of both accumulation units 100. An opening groove part 13 connecting the through-paths 11, 12 together is opened to one or both faces of the block body 10. The opening groove part 13 is sealed by a sealing plate 70.;COPYRIGHT: (C)2006,JPO&NCIPI