PRECURSOR COMPOSITION, METHOD FOR MANUFACTURING PRECURSOR COMPOSITION,METHOD FOR MANUFACTURING FERROELECTRIC FILM, PIEZOELECTRIC ELEMENT, SEMICONDUCTOR DEVICE, PIEZOELECTRIC ACTUATOR, INKJET RECORDING HEAD, AND INKJET PRINTER

摘要

PPROBLEM TO BE SOLVED: To provide precursor compositions for forming ferroelectrics which have excellent composition controllability in a liquid phase method, and in which metal components such as lead can be reused, a method for manufacturing the precursor compositions, and a method for forming ferroelectric films using the precursor compositions. PSOLUTION: The precursor composition pertains to a precursor composition including a precursor for forming the ferroelectric, wherein the ferroelectric is expressed by general formula ABSB1-x/SBCSBx/SBOSB3/SB, where element A is composed of at least Pb, element B is composed of at least one of Zr, Ti, V, W and Hf, element C is composed of at least one of Nb and Ta, and the precursor includes at least the element B and the element C, and has an ester-bond in a part thereof. PCOPYRIGHT: (C)2006,JPO&NCIPI