MEASURING ELEMENT, PROCESSING DEVICE AND MEASURING METHOD, AND MEASURING ELEMENT OF REFRACTIVE INDEX

摘要

PROBLEM TO BE SOLVED: To provide a measuring element capable of being used for a precision measuring device.;SOLUTION: The measuring element includes a light source having low coherent light; a light branching/merging section for branching a light ray from the light source to two light lays; a stage with an object to which one of the branched light rays is irradiated; a light-condensing section that is provided on an optical path between the light branching/merging section and the stage and light-condenses; and a mirror to which the other branched light ray is irradiated. By combining again reflection light (1) from the object and reflection light (2) from the mirror by the light branching/merging section and interfere to move the position of the object or the mirror, determination is made to a position that each optical path length of the reflection light (2) from the object equals from a peak position on a theoretical curve fitting to an envelope curve of an interference waveform with maximum amplitude at an equal optical path length. Also, identification is made to the position of the object from a phase difference between the interference waveforms.;COPYRIGHT: (C)2006,JPO&NCIPI