MEMBER FOR SUPPORTING THIN-FILM COATED BOARD, CONTAINER FOR STORING THE THIN-FILM COATED BOARD, MASK BLANK STORING BODY, TRANSFER MASK STORING BODY AND METHOD FOR TRANSPORTING THE THIN-FILM COATED BOARD

摘要

PPROBLEM TO BE SOLVED: To provide a member for supporting thin-film coated board by which dust generation due to particles or the like can be fully suppressed and to provide a storing container provided with the support member and suitable for storing the thin-film coated board which can store the thin-film coated board, while keeping it at high cleanliness. PSOLUTION: The support members 2, 5 are provided with a support means for supporting the thin-film coated board 1, such as a mask blank or the like. The surface of at least a portion of the support means that comes into contact with the thin-film coated board 1 is permitted to be a smooth plane having an arithmetic average surface roughness (Ra) of 0.1 μm or smaller. The surface of at least the portion of the support means that comes into contact with the thin-film coated board 1 is composed of, for instance, resin materials. In the storage container, provided with the support member for supporting the thin-film coated board 1 in a fixed status, the thin-film coated board 1 is supported by using the support members 2, 5. PCOPYRIGHT: (C)2006,JPO&NCIPI