PIEZOELECTRIC LAYER, PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC PUMP, INK-JET TYPE RECORDING HEAD, INK-JET PRINTER, SURFACE ELASTIC WAVE ELEMENT, FREQUENCY FILTER, OSCILLATOR, ELECTRONIC CIRCUIT, THIN-FILM PIEZOELECTRIC RESONATOR, AND ELECTRONIC APPLIANCE

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric element having good piezoelectric characteristic, and a piezoelectric actuator, a piezoelectric pump, an ink-jet type recording head, an ink-jet printer, a surface elastic wave element, a frequency filter, an oscillator, electronic circuits, a thin-film piezoelectric resonator, and electronic appliances using the piezoelectric element.;SOLUTION: This piezoelectric element 1 contains a substrate 2, a buffer layer 5 formed above the substrate 2, and a piezoelectric layer 6 having a perovskite type structure and formed above the buffer layer 5, and the buffer layer 5 comprises YBa₂Cu₃O_7- orientated preferentially to axis c (001), wherein is in the range of 00.6.;COPYRIGHT: (C)2006,JPO&NCIPI