BEAM DEFLECTION SCANNING METHOD, BEAM DEFLECTION SCANNING DEVICE AS WELL AS ION IMPLANTATION METHOD, AND ION IMPLANTER

摘要

PROBLEM TO BE SOLVED: To realize a deflection scanning device which is made to scan without diverging beams of large-diameter or large current, and which is practical and compact.;SOLUTION: A beam deflection scanning device periodically changes an orbit of a charged particle beam by carrying out deflection scanning for the charged particle beam having a fixed orbit in a vacuum space. This beam deflection scanning device (20) is constituted of the opposed arranged bipolar type deflection electrodes (21, 22), and the bipolar type deflection electrodes are made to be a symmetrical recessed counter electrode which has grooves (21A, 22A) extending in the beam axial direction in the inner face of the opposite direction.;COPYRIGHT: (C)2006,JPO&NCIPI