METHOD FOR FORMING RESIST PATTERN USING INK JET SYSTEM, METHOD FOR MANUFACTURING SURFACE ACOUSTIC WAVE ELEMENT PIECE, AND SURFACE ACOUSTIC WAVE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a resist pattern using an ink jet system for applying resist selectively, to provide a method for manufacturing a surface acoustic wave element piece, and to provide a surface acoustic wave device.;SOLUTION: The method for manufacturing the surface acoustic wave element piece 10 comprises a process for film-forming metal on a piezoelectric substrate 12, and forming an interdigital electrode 14 and a pad 18 connected to it; a process for forming a resist pattern by coating the pad 18 with resist droplets using an ink jet head; a process for forming a passivation film 24 on the interdigital electrode 14; and a process for removing the resist pattern.;COPYRIGHT: (C)2006,JPO&NCIPI