ANALYSIS METHOD OF PROPAGATION FACE OF MULTIPLE ROUND SURFACE ACOUSTIC WAVE ELEMENT AND ELEMENT OF THE SAME

摘要

PPROBLEM TO BE SOLVED: To eliminate a temperature measurement and analyze a factor for changing a propagation condition when the propagation condition of a propagation face is measured. PSOLUTION: A drive frequency of a surface acoustic wave excited on the propagation face 11 of a multiple round surface acoustic wave element 10, is changed, and a change rate of the propagation condition of the surface acoustic wave is found. The mass change quantity Δm dependent on the frequency and the temperature change quantity Δt independent of the frequency are respectively found among the physical quantity for indicating a physical condition of the propagation face 11 by finding a change rate of a round time required for one round while the surface acoustic wave rounds a spherical member 12 many times. PCOPYRIGHT: (C)2006,JPO&NCIPI