INFRARED SENSOR, INFRARED TYPE GAS DETECTOR, AND INFRARED RAY SOURCE

摘要

PROBLEM TO BE SOLVED: To provide an infrared sensor, an infrared type gas detector and an infrared ray source capable of reducing a body structure size, and capable of enhancing photoreception efficiency of the infrared sensor more efficient than that when applying gel as a protection film.;SOLUTION: In this infrared sensor 100 provided with a substrate 110, a membrane 120 formed in the substrate 110, a detecting element 130 with at least one part formed on the membrane 120, and for generating a detection signal based on a temperature change generated when receiving an infrared ray, and an infrared absorption film 140 formed on the membrane 120 to coat at least one part of the detecting element 130, the one-face side whole face of the substrate 110 including a pad part 118 and the infrared absorption film 140 is coated by the second protection film 150 comprising a parylene, under the condition where the detecting element 130 is connected electrically to an outside via the pad part 118 provided in an end part thereof.;COPYRIGHT: (C)2006,JPO&NCIPI