CONTAMINATION ANALYTICAL METHOD FOR CHEMICAL SOLUTION, AND CONTAMINATION ANALYTICAL SYSTEM THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a method of analyzing accurately and easily a contamination degree of a chemical solution.;SOLUTION: This method includes a step for preparing a sample of the chemical solution, a step for emitting the first wavelength of electromagnetic wave to detect the first optical characteristic of the sample, a step for predicting the second optical characteristic of the sample, using the first optical characteristic, a step for emitting the second wavelength of electromagnetic wave to detect the second optical characteristic of the sample, and a step for comparing the detected second optical characteristic with the predicted second optical characteristic to measure the contamination degree of a specified contaminant in the sample.;COPYRIGHT: (C)2006,JPO&NCIPI